论文信息 - Effect of post annealed treatment on HfN thin films prepared by DC reactive magnetron sputtering - 字舞流文

Effect of post annealed treatment on HfN thin films prepared by DC reactive magnetron sputtering

M. Horprathum | C. Chananonnawathorn | H. Nakajima | G. Gitgeatpong | J. Prathumsit | T. Lertvanithphol | B. Saekow | W. Phae-Ngam