论文信息 - Back-end integration of multilayer photonics on silicon

Back-end integration of multilayer photonics on silicon

We present vertically-stacked a-Si:H and AlN photonic circuits deposited on silicon using back-end CMOS technology. At 1550-nm telecom wavelengths, the a-Si:H (0.5-μm×0.22-μm) and AlN (1-μm×0.4-μm) channel waveguides are measured to have low propagation losses of ~3.8 and ~1.4 dB/cm, respectively. Various passive devices with high performance are demonstrated on these two photonic layers, including multimode interferences (MMI), waveguide ring resonators (WRR), and arrayed-waveguide gratings (AWG). Moreover, the thermo-optic coefficients (dn/dT) of a-Si:H and AlN are measured to be ~2.60×10-4 and ~3.56×10-5 K-1, respectively.

Guo-Qiang Lo | Shiyang Zhu

[1] Shiyang Zhu,et al. Low-loss amorphous silicon wire waveguide for integrated photonics: effect of fabrication process and the thermal stability. , 2010, Optics express.

[2] 1.5-μm-radius high-Q silicon microring resonators , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[3] N. Nishiyama,et al. Amorphous-Silicon Inter-Layer Grating Couplers With Metal Mirrors Toward 3-D Interconnection , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[4] C. Xiong,et al. Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics , 2012, 1210.0975.

[5] Michal Lipson,et al. Scalable 3D dense integration of photonics on bulk silicon. , 2011, Optics express.

[6] Giovanna Calò,et al. Vertical link solutions for multilayer optical-networks-on-chip topologies , 2014 .

[7] Tsunenobu Kimoto,et al. The temperature dependence of the refractive indices of GaN and AlN from room temperature up to 515 °C , 2008 .

[8] The Thermo Optic Coefficient of Amorphous SiN Films in the Near-Infrared and Visible Regions and Its Experimental Determination , 2013 .

[9] Keren Bergman,et al. Photonic network-on-chip architectures using multilayer deposited silicon materials for high-performance chip multiprocessors , 2011, JETC.