TEM (XHREM) and EDX Studies of 6H-SiC Porous Layer as a Substrate for Subsequent Homoepitaxial Growth
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A. Lebedev | J. Sloan | J. Hutchison | V. Shuman | N. Savkina | L. Sorokin | G. Mosina | G.N. Mosina
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A. Lebedev | J. Sloan | J. Hutchison | V. Shuman | N. Savkina | L. Sorokin | G. Mosina | G.N. Mosina