Touch mode capacitive pressure sensors
暂无分享,去创建一个
Wen H. Ko | Qiang Wang | W. Ko | Qiang Wang
[1] W. H. Ko,et al. An integrated interfacing circuit for capacitive sensors , 1994 .
[2] Lars Rosengren,et al. Micromachined sensor structures with linear capacitive response , 1992 .
[3] H. Sandmaier,et al. Non-linear analytical modelling of bossed diaphragms for pressure sensors , 1991 .
[4] J. H. Jerman. The fabrication and use of micromachined corrugated silicon diaphragms , 1990 .
[5] Wen H. Ko,et al. Modeling of touch mode capacitive sensors and diaphragms , 1999 .
[6] Daniele Marioli,et al. A thick-film capacitive pressure sensor with improved linearity due to electrode-shaping and frequency conversion , 1997 .
[7] T. Omi. Capacitive Pressure Sensor with Center Clamped Diaphragm , 1997 .
[8] Mario Di Giovanni,et al. Flat and Corrugated Diaphragm Design Handbook , 1982 .
[9] S. Timoshenko,et al. THEORY OF PLATES AND SHELLS , 1959 .