Detection of Nanoparticles Formed in CVD Plasmas using a Two-Dimensional Photon-Counting Laser-Light-Scattering Method

To detect nano-particles formed in CVD plasmas, we have developed a high sensitivity two-dimensional photon-counting laser-light-scattering (2DPCLLS) method. Size and density of nano-particles are determined from their thermal coagulation that takes place after turning off discharges. The 2DPCLLS system realizes detection of nano-particles from 1.3 nm in size and 10 cm in number density to 6 nm and 10 cm. It provides easy observation of their transport with a high time resolution of 33 μs and a good spatial resolution of 1x1.25x1.25 mm.