论文信息 - Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Compact microracetrack resonator (MRR) devices are presented with small SU-8 polymer strip waveguides. The SU-8 strip waveguide has an SU-8 polymer core (n~1.573) , a SiO2 buffer (n~1.445), and an air cladding. The fabricated straight waveguide has a low propagation loss of about 0.1 dB/mm. With such a high index-contrast optical waveguide, a compact MRR with a small bending radius (~150 mum) are designed and fabricated. The measured spectral responses of the through/drop ports show a Q-factor of 8000.

Sailing He | Daoxin Dai | Bo Yang | Liu Yang | Zhen Sheng

[1] L.J. Guo,et al. Polymer microring resonators for biochemical sensing applications , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[2] Chung-Yen Chao,et al. Polymer microring resonators fabricated by nanoimprint technique , 2002 .

[3] Birefringence in benzocyclobutene strip optical waveguides , 2003, IEEE Photonics Technology Letters.

[4] Chung-Yen Chao,et al. Biochemical sensors based on polymer microrings with sharp asymmetrical resonance , 2003 .

[5] Sailing He,et al. A Minimized SiO$_{2}$ Waveguide With an Antiresonant Reflecting Structure for Large-Scale Optical Integrations , 2007, IEEE Photonics Technology Letters.

[6] Y. Kokubun,et al. Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[7] D. Van Thourhout,et al. Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography , 2004, IEEE Photonics Technology Letters.

[8] P. Rabiei,et al. Tunable polymer double micro-ring filters , 2003, IEEE Photonics Technology Letters.

[9] Qianfan Xu,et al. Micrometre-scale silicon electro-optic modulator , 2005, Nature.