论文信息 - Growth of Ti3SiC2 thin films by elemental target magnetron sputtering - 字舞流文

Growth of Ti3SiC2 thin films by elemental target magnetron sputtering

J. Emmerlich | J. Molina-Aldareguia | U. Jansson | L. Hultman | P. Persson | Z. Czigány | H. Högberg | J. Palmquist | S. Sasvári