Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams

Spherical solid tin targets were illuminated uniformly with twelve beams from the Gekko XII laser system to create spherical plasmas, and the extreme ultraviolet (EUV) emission spectra from the plasmas were measured. The highest conversion efficiency of 3% to 13.5nm EUV light in 2% bandwidth was attained for an irradiance of around 5×1010W∕cm2. The experimental results were reproduced fairly well using a theoretical model taking the power balance in the plasma into consideration.

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