High-fill-factor suspended-resistor IR scene generator: design, fabrication, and preliminary performance

We describe an experimental program of design, fabrication and preliminary performance of an infrared scene generator system designed as a 256 X 256 element electrically heated pixel array. Each pixel consists of a suspended resistor element which has a high area fill factor, being designed as a 3D structure of an electronic drive backplane. Initial performance shows that a practical device can be designed with around 300 degree(s)C temperature range.