Random Telegraph Signal Statistical Analysis using a Very Large-scale Array TEG with 1M MOSFETs

In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (10 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS.