Flexible, electrostatic microfluidic actuators based on thin film fabrication

Abstract Active microfluidic components are required in many lab-on-a-chip applications, for handling tiny amounts of liquids on the platform. The work presented here reveals an electrostatic microfluidic actuators that can be fabricated with thin film process technology, and is based on flexible, biocompatible materials. We have successfully characterized microvalves for both the static and dynamic mode, using non-polar fluids. An extension of the proposed fabrication method enables actuation of fluids of any polarity, as the electrostatic field no longer crosses the transport fluid

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