Smiconductor manufacturing management system using rfid
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The present invention relates to a control system of a semiconductor manufacturing process with the RFID that relates to management sushi system of a semiconductor manufacturing process, and more specifically. The invention and Eilat box for storing a wafer; And an RF tag attached to the Trat box; Reading the data stored in the RF tag and to the read unit; Connection via the reading unit to the network, and the network initiates a semiconductor manufacturing process control system using RFID including a central controller to determine the state of each of the Trat box by using the data read by the reading unit and stored. RFID, antenna, reader, RF tags, Eilat box