Control of surface energy of silicon oxynitride films.

Microstructure and chemical composition determine the wetting property of solid surfaces. To achieve hydrophobicity or hydrophilicity, recent efforts have mostly focused on designed patterns and sophisticated surface modification. Here we show the fabrication of a dense amorphous silicon oxynitride (SiON) film by simple annealing of perhydropolysilazane (PHPS), which experiences significant and abrupt transition in surface energy as a function of temperature. The polar component of surface energy, derived from contact angle measurements, exhibits an increase of 20-40 times in an annealing temperature window of ~100 °C, which leads to a 5-fold increase of its total surface energy. On the basis of the chemical analyses, we propose a compositional gradient in the film. Due to this gradient, the hydrophilic SiON film, for instance, can be used as the bond coat material in a double-layer environmental barrier coating system with outstanding oxidation resistant properties.

[1]  F. Ohuchi,et al.  The Conversion of Perhydropolysilazane into SiON Films Characterized by X‐Ray Photoelectron Spectroscopy , 2012 .

[2]  R. Bordia,et al.  Conversion behaviour and resulting mechanical properties of polysilazane-based coatings , 2012 .

[3]  R. Bordia,et al.  High performance environmental barrier coatings, Part II: Active filler loaded SiOC system for superalloys , 2011 .

[4]  W. Krenkel,et al.  High performance environmental barrier coatings, Part I: Passive filler loaded SiCN system for steel , 2011 .

[5]  Lei Jiang,et al.  A Novel Superhydrophilic and Underwater Superoleophobic Hydrogel‐Coated Mesh for Oil/Water Separation , 2011, Advanced materials.

[6]  S. Konishi,et al.  Formation of superhydrophobic/superhydrophilic patterns by combination of nanostructure-imprinted perfluoropolymer and nanostructured silicon oxide for biological droplet generation , 2011 .

[7]  M. A. Majid,et al.  Functionalized PSf/SiO2 nanocomposite membrane for oil-in-water emulsion separation , 2011 .

[8]  Yonggang Guo,et al.  A facile process for preparing superhydrophobic films with surface-modified SiO2/nylon 6,6 nanocomposite , 2011 .

[9]  Laigui Yu,et al.  Preparation of superhydrophobic poly(methyl methacrylate)-silicon dioxide nanocomposite films , 2010 .

[10]  Mingjie Liu,et al.  Switchable Adhesion on Liquid/Solid Interfaces , 2010 .

[11]  Paolo Colombo,et al.  Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics , 2010 .

[12]  John P. Sagan,et al.  Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane , 2010 .

[13]  C. Santilli,et al.  Corrosion protection of stainless steel by polysiloxane hybrid coatings prepared using the sol-gel process , 2010 .

[14]  M. Lindén,et al.  Wetting studies of hydrophilic-hydrophobic TiO2@SiO2 nanopatterns prepared by photocatalytic decomposition. , 2010, Langmuir : the ACS journal of surfaces and colloids.

[15]  N. Phong,et al.  Characteristics modification of TiO2 thin films by doping with silica and alumina for self-cleaning application , 2009 .

[16]  D. Decker,et al.  Advanced Coatings on the Basis of Si(C)N Precursors for Protection of Steel against Oxidation , 2009 .

[17]  L. Gerhardt,et al.  A Simple, One‐Step Approach to Durable and Robust Superhydrophobic Textiles , 2008 .

[18]  N. Hwang,et al.  Study of structural and electronic environments of hydrogenated amorphous silicon carbonitride (a-SiCN:H) films deposited by hot wire chemical vapor deposition , 2008 .

[19]  H. Kozuka,et al.  Polysilazane as the source of silica: the formation of dense silica coatings at room temperature and the new route to organic–inorganic hybrids , 2008 .

[20]  J. Torrey,et al.  Processing of Polymer-Derived Ceramic Composite Coatings on Steel , 2007 .

[21]  M. Buchmeiser,et al.  Conversion of perhydropolysilazane into a SiOx network triggered by vacuum ultraviolet irradiation: access to flexible, transparent barrier coatings. , 2007, Chemistry.

[22]  F. Mizukami,et al.  Flexible Transparent Clay Films with Heat‐Resistant and High Gas‐Barrier Properties , 2007 .

[23]  K. Ciuffi,et al.  Glasses in the SiOCN system produced by pyrolysis of polycyclic silazane/siloxane networks , 2007 .

[24]  R. Hauert,et al.  Influence of film structure and composition on diffusion barrier performance of SiOx thin films deposited by PECVD , 2006 .

[25]  Rudolf von Rohr,et al.  Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD , 2005 .

[26]  R. Mehnert,et al.  Preparation of moisture curable polysilazane coatings: Part I. Elucidation of low temperature curing kinetics by FT-IR spectroscopy , 2005 .

[27]  H. Kozuka,et al.  Preparation of Hot Water-Resistant Silica Thin Films from Polysilazane Solution at Room Temperature , 2004 .

[28]  W. Schwieger,et al.  Zeolite Coatings on Microcellular Ceramic Foams: A Novel Route to Microreactor and Microseparator Devices , 2004 .

[29]  H. Kozuka,et al.  Formation of silica coating films from spin-on polysilazane at room temperature and their stability in hot water , 2004 .

[30]  Karen Maex,et al.  Low dielectric constant materials for microelectronics , 2003 .

[31]  S. Iwamori,et al.  Silicon oxide gas barrier films deposited by reactive sputtering , 2003 .

[32]  M. Scheffler,et al.  Ceramic Tapes from Preceramic Polymers , 2002 .

[33]  H. Sugimura,et al.  Gas barrier properties of silicon oxide films prepared by plasma-enhanced CVD using tetramethoxysilane , 2002 .

[34]  Steven K. Skirboll,et al.  Surface passivation of a microfluidic device to glial cell adhesion: a comparison of hydrophobic and hydrophilic SAM coatings. , 2002, Biomaterials.

[35]  R. Riedel,et al.  Thermal cross-linking and pyrolytic conversion of poly(ureamethylvinyl)silazanes to silicon-based ceramics , 2001 .

[36]  Peter Greil,et al.  Polymer Derived Engineering Ceramics , 2000 .

[37]  G. Ziegler,et al.  Structural characterisation of silicon carbonitride ceramics derived from polymeric precursors , 2000 .

[38]  R. Riedel,et al.  Synthesis of Polycrystalline Silicon Carbide by a Liquid‐Phase Process , 1999 .

[39]  Wei Qian,et al.  Amorphous silica nanowires: Intensive blue light emitters , 1998 .

[40]  Mohamed Latreche,et al.  Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition , 1998 .

[41]  A. Sassella.  Optical characterization of amorphous dielectric films , 1996 .

[42]  G. Lucovsky.  Preparation of device‐quality SiO2 thin films by remote plasma‐enhanced chemical vapour deposition (PECVD): Applications in metal‐oxide‐semiconductor (MOS) devices , 1996 .

[43]  A. Evans,et al.  The fracture resistance of metal-ceramic interfaces , 1993 .

[44]  W. Böcker,et al.  Polymer‐derived silicon nitride and silicon carbonitride fibers , 1992 .

[45]  K. Reichelt,et al.  The preparation of thin films by physical vapour deposition methods , 1990 .

[46]  Y. Ikada,et al.  Dispersive component of surface free energy of hydrophilic polymers , 1981 .

[47]  M. L. Hair,et al.  Hydroxyl groups on silica surface , 1975 .

[48]  D. H. Kaelble,et al.  Dispersion-Polar Surface Tension Properties of Organic Solids , 1970 .

[49]  F. Fowkes,et al.  DETERMINATION OF INTERFACIAL TENSIONS, CONTACT ANGLES, AND DISPERSION FORCES IN SURFACES BY ASSUMING ADDITIVITY OF INTERMOLECULAR INTERACTIONS IN SURFACES , 1962 .

[50]  S. Moon,et al.  A Technique for Converting Perhydropolysilazane to SiO x at Low Temperature , 2010 .

[51]  J. Torrey.  Polymer derived ceramic composites as environmental barrier coatings on steel , 2006 .

[52]  C. Kato,et al.  Formation of Silica Coatings from Perhydropolysilazane Using Vacuum Ultraviolet Excimer Lamp , 2004 .

[53]  Chih-Ming Ho,et al.  Reconfigurable hydrophobic/hydrophilic surfaces in microelectromechanical systems (MEMS) , 2004 .

[54]  G. Cao,et al.  Sol-Gel-Derived Hybrid Coatings for Corrosion Protection , 2003 .

[55]  Gary G. Maciel,et al.  The pyrolytic conversion of perhydropolysilazane into silicon nitride , 1998 .

[56]  Hood Chatham,et al.  Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates , 1996 .