论文信息 - Extraction of the Appropriate Material Property for Realistic Modeling of Through-Silicon-Vias using μ-Raman Spectroscopy - 字舞流文

Extraction of the Appropriate Material Property for Realistic Modeling of Through-Silicon-Vias using μ-Raman Spectroscopy

B. Swinnen | I. De Wolf | B. Vandevelde | D. Vandepitte | C. Okoro | Y. Yang | B. Verlinden