Optical constants of superthin gold films for soft x rays

The optical constants, δ=1−n and k, of superthin gold films have been determined from the reflectance data obtained in the soft x‐ray region of 60–900 eV. The gold films were prepared to various thicknesses, d=39–270 A, by ion‐beam sputtering (IBS) and electron‐beam evaporation (EB). A plane‐parallel slab model with due consideration for the surface and the interfacial roughness was used to analyze the data by least‐squares curve fitting. The optical constants derived for the IBS samples definitely show variations in the vicinity of d=100 A. It is also found that δ of the 201‐A‐thick IBS film is smaller by about 7% than that of the 211‐A‐thick EB film.