2 C 1 . 04 Physically-based Modeling of Squeeze Film Damping by Mixed Level System Simulation

We propose a mixed Ievel simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of the damping effects in system-level models of entire microsystems in a natural physical-based and flexible way while it allows also for complex geometries and coupling to other energy and signal domains. Results obtained for elementary and complex microstructures are in excellent agreement with 3D-Navier-Stokesbased FEM simulations, thus proving the quality of our approach.