Reflection scanning near-field optical microscopy (R-SNOM) in constant height mode with a dielectric probe image interpretation and resolution for high topographic variations

Abstract The understanding of the correlation between the near-field images that are recorded by scanning near-field optical microscopy (SNOM) and the local optical properties of the sample surface (topography, index, etc.) is a condition for the development of such microscopes. The aim of this paper is to show that the “constant height imaging” (CHI) mode provides useful near-field characterizations, even in case of high-relief samples. Actually, the CHI near-field signal is free from perturbations brought by usual feedback regulation systems. Furthermore, we show a comparison between experimental and theoretical data to explain near-field image formation. Finally, we develop a specific method based on the Fourier spectral analysis to characterize the experimental SNOM setup working in CHI mode.

[1]  T. Milster,et al.  Linear behavior of a near-field optical scanning system , 1995 .

[2]  Dominique Barchiesi,et al.  Scanning-tunneling optical microscopy: a theoretical macroscopic approach , 1992 .

[3]  D. Barchiesi Application of Fourier algorithm to Near Field Optical Images: Local Resolution Estimation , 1997 .

[4]  Dominique Barchiesi,et al.  Near-field calculations of the electromagnetic field in a metallic sample illuminated by a metallized nano-source , 1996, Other Conferences.

[5]  Christian Pieralli,et al.  Statistical estimation of point spread function applied to scanning near-field optical microscopy , 1994 .

[6]  R. Toledo-Crow,et al.  Near‐field differential scanning optical microscope with atomic force regulation , 1992 .

[7]  Motoichi Ohtsu,et al.  Power spectral analysis for evaluating optical near-field images of 20 nm gold particles , 1996 .

[8]  J. Goudonnet,et al.  Numerical study of the tip-sample interaction in the photon scanning tunneling microscope , 1996 .

[9]  J. Goudonnet,et al.  Computation of near field diffraction by a dielectric grating: a comparison with experiments , 1995 .

[10]  S. Bozhevolnyi,et al.  External-reflection near-field optical microscope with cross-polarized detection. , 1994, Applied optics.

[11]  E. Betzig,et al.  Combined shear force and near‐field scanning optical microscopy , 1992 .

[12]  A. Jalocha,et al.  A scanning optical profilometer using the SNOM architecture , 1994 .

[13]  Dominique Barchiesi,et al.  Application of Mie Scattering of Evanescent Waves to Scanning Tunnelling Optical Microscopy Theory , 1993 .

[14]  Klony Lieberman,et al.  Simultaneous scanning tunneling and optical near‐field imaging with a micropipette , 1993 .

[15]  O. Marti,et al.  Reflection-scanning near-field optical microscopy and spectroscopy of opaque samples , 1994 .

[16]  M. Spajer,et al.  A scanning local probe profilometer and reflectometer: application to optical control of integrated circuits , 1994 .

[17]  M. Nieto-Vesperinas,et al.  Surface structure and polariton interactions in the scattering of electromagnetic waves from a cylinder in front of a conducting grating: theory for the reflection photon scanning tunneling microscope , 1996 .

[18]  D. Barchiesi,et al.  Probes for scanning tunneling optical microscopy: a theoretical comparison , 1993 .

[19]  Pierre-Michel Adam,et al.  Analysis of image formation with a photon scanning tunneling microscope , 1996 .

[20]  Oscar Noordman,et al.  Operation of a scanning near-field optical microscope in reflection in combination with a scanning force microscope , 1992, Photonics West - Lasers and Applications in Science and Engineering.

[21]  D. Barchiesi,et al.  A perturbative diffraction theory of a multilayer system: applications to near-field optical microscopy SNOM and STOM , 1995 .

[22]  D Barchiesi,et al.  Image resolution in reflection scanning near-field optical microscopy using shear-force feedback: characterization with a spline and Fourier spectrum. , 1997, Applied optics.

[23]  E. Popov,et al.  Convergence of Rayleigh-Fourier Method and Rigorous Differential Method for Relief Diffraction Gratings , 1986 .

[24]  Dominique Barchiesi,et al.  A 3-D multilayer model of scattering by nanostructures. Application to the optimisation of thin coated nano-sources , 1996 .

[25]  N. F. Hulst,et al.  Dielectric and fluorescent samples imaged by scanning near-field optical microscopy in reflection , 1995 .

[26]  Girard,et al.  Computing the optical near-field distributions around complex subwavelength surface structures: A comparative study of different methods. , 1996, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[27]  Jean-Jacques Greffet,et al.  Surface profile reconstruction using near-field data , 1995 .

[28]  P. Schiavone,et al.  Visualization of latent images by reflection near field optical microscopy , 1995 .

[29]  M. Nieto-Vesperinas,et al.  A Theoretical Study of Near Field Interactions with Local Probes , 1995 .