论文信息 - New Designs for MEMS-Micromirrors and Micromirror Packaging with Electrostatic and Piezoelectric Drive - 字舞流文

New Designs for MEMS-Micromirrors and Micromirror Packaging with Electrostatic and Piezoelectric Drive

B. Wagner | U. Hofmann | V. Stenchly | R. Dudde | S. Gu-Stoppel | D. Kaden | Quenzer H.-J.