Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition

Abstract Transparent single-crystal TiO 2 films were grown on (001) SrTiO 3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO 2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO 2 //[100] SrTiO 3 in the (001) anatase TiO 2 //(001) SrTiO 3 film, [010] anatase TiO 2 //[100] SrTiO 3 in the (101) anatase TiO 2 //(001) SrTiO 3 film, and [001] rutile TiO 2 //[100] SrTiO 3 in the (110) rutile//(001) SrTiO 3 film. The TiO 2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO 2 film at a wavelength of 800 nm.

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