A Study on Erosion of Alumina Wafer in Abrasive Water Jet Machining

Abrasive water jet machining is considered as a promising technique in hard and brittle material processing. This paper studies the erosion performance of the alumina ceramics in the different process parameters. In the erosion experiments, alumina ceramics wafers were eroded by the abrasive waterjet machining. The single factor experiments were carried out to understand the effect of different process parameters (jet impact angle, standoff distance, water pressure, abrasive particle diameter) on the material removal rate (MRR), the removal depth and surface roughness (Ra). The experimental results can provide guidance for alumina ceramics abrasive water jet cutting and polishing.