Actuation of polysilicon surface-micromachined mirrors

Two types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 micrometers ) ranges with submicron positioning.

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