Actuation of polysilicon surface-micromachined mirrors
暂无分享,去创建一个
[1] R. Muller,et al. Optoelectronic packaging using silicon surface-micromachined alignment mirrors , 1995, IEEE Photonics Technology Letters.
[2] Meng-Hsiung Kiang,et al. Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers , 1996, IEEE Photonics Technology Letters.
[3] William C. Tang,et al. Electrostatic-comb drive of lateral polysilicon resonators , 1990 .
[4] Kam Y. Lau,et al. Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
[5] Kam Y. Lau,et al. Impact-actuated linear microvibromotor for micro-optical systems on silicon , 1994, Proceedings of 1994 IEEE International Electron Devices Meeting.