论文信息 - Improvement in NBTI by catalytic-CVD silicon nitride for hp-65nm technology - 字舞流文

Improvement in NBTI by catalytic-CVD silicon nitride for hp-65nm technology

Y. Akasaka | Y. Nara | K. Torii | T. Watanabe | S. Inumiya | T. Matsuki | Y. Yuba | H. Amai | M. Kitazoe | T. Saitou | M. Yamamura | T. Robata