Integration of conducting polymer micro- and nano-actuators with semiconductor photonic devices

In this work, PPy (polypyrrole) doped with DBS (dodecylbenzenesulfonate) anions is used as actuators or "artificial muscles". Microactuators described in this study are fabricated by electrochemically polymerizing PPy on patterned Au thin film deposited on a Si pn junction. A PPy nanostructure has been fabricated on a semiconductor substrate, enabling future integration with electronic or photonic devices.