To solve the scheduling problem of batch processing machine in the furnace district of semiconductor wafer fabrication system(SWFS),this paper proposed a scheduling algorithm which satisfies the process constraint and equipment limitations.Considering the dynamic arrival of lots and the SWFS's features of large scale and multiple re-entrant process,the algorithm may realize the real-time combinatory dispatching of multi-product and multi-machine by optimizing average waiting time of lots.The simulation based experiments were executed on a virtual SWFS fab simulation platform,and the result shows that the algorithm can significantly improve the fill rate and the utilization of the bottleneck,thus shorten the cycle time in real-time dispatching.