12×12 packaged digital silicon photonic MEMS switches

We report on the first electrical and optical packaging of digital silicon photonic MEMS switches with 12×12 ports, 13∼18dB fiber-to-fiber loss, 10⁻¹¹ BER for 10-Gb/s datastream, 0.4μs switch reconfiguration time, and <1.6V (5%) switching voltage variations.