Highly efficient oxide-confined VCSEL arrays for parallel optical interconnects

We have designed and fabricated 1 X 8 and 4 X 8 VCSEL arrays at 850 nm and 980 nm operation wavelength, respectively, which are designed for maximum single-mode output power and high frequency applications. GaAs VCSELs in the 1 X 8 array show record high single-mode CW powers up to 4.8 mW. Individual devices of the 4 X 8 InGaAs VCSEL array exhibit small signal modulation bandwidths exceeding 10 GHz.