The Use Of Multilayer Diffraction Gratings In The Determination Of X-Ray, Soft X-Ray, And Vuv Elemental Scattering Cross-Sections

The dispersion of light by multilayer combined microstructure diffraction gratings is affected by the scattering cross-sections of the elements used to synthesize the multilayer. This effect will be analytically evaluated, and the results of model calculations for spectral regions of interest presented. Experimental results for these domains will also be presented and compared with data from the literature and with the results of modelling calculations.