Large-force electrothermal linear micromotors

Electrothermal linear micromotors fabricated by deep reactive ion etching of silicon-on-insulator wafers are presented. These high-aspect-ratio motors are powered by thermal actuator arrays with a height of 50 µm. Synchronized arrays, each containing ten actuators connected by a midpoint yoke, are used to advance a slider through frictional contact. Forces of 6.7 mN have been demonstrated at a voltage of 12 V using motors measuring 2.5 mm by 2.1 mm. Unidirectional motors have been successfully operated at speeds of up to 1 mm s−1 over a range in excess of 2 mm. Motors are found to be well suited for positioning compliant mechanisms and similar applications requiring large forces and displacements at low drive voltages.

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