论文信息 - Defect evolution and C+/F+ co-implantation in millisecond Flash annealed ultra-shallow junctions - 字舞流文

Defect evolution and C+/F+ co-implantation in millisecond Flash annealed ultra-shallow junctions

F. Cristiano | R. Duffy | P. Fazzini | F. Milési | W. Lerch | A. Pakfar | E. Bazizi | S. Paul | H. Bourdon | Boninelli