Self-Sensing Measurement in Piezoelectric Cantilevered Actuators for Micromanipulation and Microassembly Contexts

This chapter aims to develop a self-sensing technique to measure the displacement and the force in piezoelectric microactuators dedicated to micromanipulation and microassembly contexts. In order to answer the requirements in these contexts, the developed self-sensing should perform a long duration measurement of constant signals (displacement and force) as well as a high precision. Furthermore, we propose to consider the dynamics in the displacement self-sensing measurement such that a positioning feedback is possible and therefore a high micro/nanopositioning accuracy is obtained. The experimental results validate the proposed technique and demonstrate its conveniency for micromanipulation and microassembly contexts.

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