论文信息 - Effect of bridging groups of precursors on modulus improvement in plasma co-polymerized low-k films - 字舞流文

Effect of bridging groups of precursors on modulus improvement in plasma co-polymerized low-k films

T. Kikkawa | Y. Hayashi | J. Kawahara | K. Kinoshita | M. Komatsu | A. Nakano | Y. Seino | N. Kunimi | R. Ichikawa | Y. Takasu