CONTACTLESS MAGNETIC MICRO-BEARING BASED ON 3D SOLENOIDAL MICRO-COILS FOR ADVANCED POWERMEMS COMPONENTS

We present for the first time a contactless magnetic micro-bearing based on multi-turn high aspect-ratio 3D micro-coils manufactured with a wirebonder in a fully MEMS-integrated technology. We demonstrate levitation of a 25μm thick Al plate with diameters between 1700 and 2700μm to a levitation height up to 120μm for 1.8MHz, 20Vpp AC excitation voltage. An important issue of frictionless systems is the overall stability. In order to stabilize the levitation of the Al plate, we report the successful simulation, design and testing of a stabilization micro-coil, coaxial with the levitation micro- coil, which centers the Al plate by constraining it laterally.

[1]  Wenyuan Chen,et al.  Development of a micromachined rotating gyroscope with electromagnetically levitated rotor , 2006 .

[2]  S.A. Jacobson,et al.  A self-acting gas thrust bearing for high-speed microrotors , 2004, Journal of Microelectromechanical Systems.

[3]  Hongguang Li,et al.  Electrostatic micromotor and its reliability , 2005, Microelectron. Reliab..

[4]  C. Shearwood,et al.  Development of a levitated micromotor for application as a gyroscope , 2000 .

[5]  Zhang Wen.  ELECTROSTATIC MICROMOTOR AND ITS RELIABILITY , 2005 .

[6]  Benjamin Shapiro,et al.  Characterization of dynamic friction in MEMS-based microball bearings , 2004, IEEE Transactions on Instrumentation and Measurement.

[7]  Wenyuan Chen,et al.  The study of an electromagnetic levitating micromotor for application in a rotating gyroscope , 2006 .

[8]  R. Reuben,et al.  Effect of progressive wear on the friction characteristics of nickel LIGA processed rotors , 1996 .

[9]  Jeffrey H. Lang,et al.  Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion , 2006 .

[10]  J. Korvink,et al.  3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[11]  U. Wallrabe,et al.  Solenoidal micro coils manufactured with a wire bonder , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[12]  C. Shearwood,et al.  Modelling and testing of a frictionless levitated micromotor , 1997 .