论文信息 - Fabrication of sub-10nm Si-tip array coated with Si3N4 thin film for potential NSOM and liquid metal ion source applications - 字舞流文

Fabrication of sub-10nm Si-tip array coated with Si3N4 thin film for potential NSOM and liquid metal ion source applications

D. W. Kim | M. Jung | S. S. Choi

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