A model of voltage-dependent dielectric losses for ferroelectric MMIC devices

Abstract The use of high-dielectric films for microwave devices, especially phased-array radar systems, in the tens of GHz regime requires very low-loss (0.01 to 0.1) films. Unfortunately most ferroelectrics have losses that diverge (greater than unity) in this frequency range. We develop in the present study quantitative models for dielectric loss in both SrTiO3 and BaxSr1−xTiO3 (BST) that give dependences upon temperature, frequency, and especially voltage or field. In pure strontium titanate we find that loss is intrinsic, with quality factor “Q” greater than 1000; and a dramatic voltage dependence of tan δ is observed to fit the C3/2(V) dependence upon capacitance predicted for three- and four-phonon anharmonicity for voltages up to 5V (E = 250 kV/cm). In most barium strontium titanate ceramic films the loss is extrinsic at 100 MHz, and the surface layer model of Neumann and Hofmann describes the dependence of tan δ upon thickness D rather well, with tan δ increasing from 0.001 at D = 5 microns to 0.1...

[1]  James F. Scott,et al.  TdI10: Ferroelectric thin films in integrated microelectronic devices , 1992 .

[2]  R. Cowley THE LATTICE DYNAMICS OF AN ANHARMONIC CRYSTAL , 1963 .

[3]  Rainer Waser,et al.  dc Electrical Degradation of Perovskite‐Type Titanates: III, A Model of the Mechanism , 1990 .

[4]  Kikuo Wakino,et al.  Far Infrared Reflection Spectra of Ba(ZnTa)O3–BaZrO3 Dielectric Resonator Material , 1985 .

[5]  Charles Elbaum,et al.  Ultrasonic Methods in Solid State Physics , 1969 .

[6]  R. A. Silverman,et al.  Methods of Quantum Field Theory in Statistical Physics , 1964 .

[7]  Anomalous ultrasonic absorption in LiNbO3 crystals , 1989 .

[8]  V. I. Shishkovsky,et al.  High-temperature electrical conductivity and point defects in lead zirconate-titanate , 1977 .

[9]  R. Cowley On the theory of ferroelectricity and anharmonic effects in crystals , 1965 .

[10]  V. Gurevich Transport in phonon systems , 1986 .

[11]  J. Tarascon,et al.  Epitaxial Cuprate Superconductor/Ferroelectric Heterostructures , 1991, Science.

[12]  J P Carrico,et al.  Thermally stimulated field emission from pyroelectric LiNbO3 , 1974 .

[13]  T. Matsubara A New Approach to Quantum-Statistical Mechanics , 1955 .

[14]  W. Känzig Space Charge Layer Near the Surface of a Ferroelectric , 1955 .

[15]  B. Silverman,et al.  MICROWAVE ABSORPTION IN CUBIC STRONTIUM TITANATE , 1962 .

[16]  R. Waser,et al.  Theory of conduction and breakdown in perovskite thin films , 1992 .

[17]  Bruno Scrosati,et al.  Fast Ion Transport in Solids , 1993 .

[18]  James F. Scott,et al.  Switching kinetics of lead zirconate titanate submicron thin‐film memories , 1988 .

[19]  J. Fousek,et al.  Dielectric spectra of some ceramics for microwave applications in the range of 1010–1014 Hz , 1989 .

[20]  N. Missert,et al.  Growth and characterization of YBCO/insulator/YBCO trilayers , 1993, IEEE Transactions on Applied Superconductivity.

[21]  J. Scott,et al.  Raman spectroscopy of structural phase transitions in Ag26I18W4O16 , 1978 .

[22]  A. Tagantsev,et al.  Intrinsic dielectric loss in crystals , 1991 .

[23]  R. Zuleeg,et al.  Quantitative measurement of space-charge effects in lead zirconate-titanate memories , 1991 .

[24]  D. S. Falk,et al.  Phonons: In Perfect Lattices and in Lattices with Point Imperfections , 1967 .

[25]  R. O. Bell,et al.  MICROWAVE LOSSES IN STRONTIUM TITANATE ABOVE THE PHASE TRANSITION , 1962 .

[26]  J. Scott,et al.  Scaling of diverging optical phonon linewidth in displacive ferroelectrics , 1986 .