Growth of Bulk GaN and AlN: Progress and Challenges

GaN-based optoelectronic and electronic devices such as light-emitting diodes (LEDs), laser, and heterojunction field-effect transistors (HFETs) typically use material grown on foreign substrates such as sapphire, Si, and SiC. However, thermal and lattice mismatch present prevent attainment of quality films deemed necessary by ever increasing demand on device performance. In fact in LEDs intended for solid state lighting, internal quantum efficiencies near 100% might be needed, and further these high efficiencies would have to be retained at very high injection current levels. On the electronic device side, high radio-frequency (RF) power, particularly high-power switching devices, push the material to its limits. Consequently, as has been the case for other successful semiconductor materials systems, native substrates must be developed for the GaN family. In this paper, various approaches such as high-pressure nitrogen solution (HPNS), ammonothermal, and Na flux methods, and an intermediary technique called the hydride vapor phase epitaxy (HVPE; to a lesser extent as there is a review devoted to this technique in this issue) along with their strengths and challenges are discussed.

[1]  Masashi Yoshimura,et al.  Growth of Transparent, Large Size GaN Single Crystal with Low Dislocations Using Ca-Na Flux System , 2003 .

[2]  Zlatko Sitar,et al.  Seeded growth of AlN on N- and Al-polar AlN seeds by physical vapor transport , 2006 .

[3]  M. Boćkowski,et al.  Gallium nitride growth on sapphire/GaN templates at high pressure and high temperatures , 2005 .

[4]  Xueping Xu,et al.  Characteristics of semi-insulating, Fe-doped GaN substrates , 2003 .

[5]  Leo J. Schowalter,et al.  Structural and surface characterization of large diameter, crystalline AlN substrates for device fabrication , 2008 .

[6]  James H. Edgar,et al.  Substrates for gallium nitride epitaxy , 2002 .

[7]  Izabella Grzegory,et al.  High nitrogen pressure growth of GaN crystals and their applications for epitaxy of GaN — based structures , 2001 .

[8]  Peter Capper Bulk crystal growth of electronic, optical & optoelectronic materials , 2005 .

[9]  Jacek B. Jasinski,et al.  Comparison between structural properties of bulk GaN grown under high N pressure and GaN grown by other methods , 2002 .

[10]  Hideo Iwasaki,et al.  Historical review of quartz crystal growth , 2002 .

[11]  Dirk Ehrentraut,et al.  The Ammonothermal Crystal Growth of Gallium Nitride—A Technique on the Up Rise , 2010, Proceedings of the IEEE.

[12]  Boris M. Epelbaum,et al.  Seeded PVT Growth of Aluminum Nitride on Silicon Carbide , 2003 .

[13]  Hadis Morkoç,et al.  Bulk ZnO: Current Status, Challenges, and Prospects , 2010, Proceedings of the IEEE.

[14]  Masashi Yoshimura,et al.  Effects of ammonia gas on threshold pressure and seed growth for bulk GaN single crystals by Na flux method , 2003 .

[15]  Ishwara B. Bhat,et al.  Preparation and Characterization of Single-crystal Aluminum Nitride Substrates , 2000 .

[16]  Martin Kuball,et al.  Influence of buffer layer and 6H-SiC substrate polarity on the nucleation of AlN grown by the sublimation sandwich technique , 2001 .

[17]  J. A. Van Vechten,et al.  Quantum Dielectric Theory of Electronegativity in Covalent Systems. III. Pressure-Temperature Phase Diagrams, Heats of Mixing, and Distribution Coefficients , 1973 .

[18]  Dirk Ehrentraut,et al.  The Ammonothermal Crystal Growth of Gallium NitrideVA Technique on the Up Rise Progress for over a decade has resulted in fabrication of large, single, gallium nitride crystals with structural properties that make them suitable for production of optoelectronic devices. , 2010 .

[19]  Rafael Dalmau,et al.  Seeded growth of AlN bulk single crystals by sublimation , 2002 .

[20]  M. Morishita,et al.  Effect of carbon additive on increases in the growth rate of 2 in GaN single crystals in the Na flux method , 2008 .

[21]  Boris M. Epelbaum,et al.  PVT growth of bulk AlN crystals with low oxygen contamination , 2003 .

[22]  R. Henry,et al.  Growth of GaN crystals from molten solution with Ga free solvent using a temperature gradient , 2005 .

[23]  Takahiro Yamada,et al.  The process of GaN single crystal growth by the Na flux method with Na vapor , 2006 .

[24]  Takahiro Yamada,et al.  Seeded Growth of GaN Single Crystals by Na Flux Method Using Na Vapor , 2006 .

[25]  S. Porowski HIGH PRESSURE CRYSTALLIZATION OF III-V NITRIDES , 1995 .

[26]  Michael A. Mastro,et al.  Seeded growth of GaN single crystals from solution at near atmospheric pressure , 2008 .

[27]  G. A. Slack,et al.  Growth of high purity AlN crystals , 1976 .

[28]  Balaji Raghothamachar,et al.  Seeded growth of AlN bulk crystals in m- and c-orientation , 2009 .

[29]  K. Oshima,et al.  Crystal growth of GaN by ammonothermal method , 2004 .

[30]  Y. Mori,et al.  Growth of high-quality large GaN crystal by Na flux LPE method , 2009, OPTO.

[31]  G. A. Slack,et al.  Ain single crystals , 1977 .

[32]  M. Boćkowski,et al.  Temperature dependence of electrical properties of gallium-nitride bulk single crystals doped with Mg and their evolution with annealing , 2001 .

[33]  M. Boćkowski,et al.  The microstructure of gallium nitride monocrystals grown at high pressure , 1996 .

[34]  James S. Speck,et al.  Phase selection of microcrystalline GaN synthesized in supercritical ammonia , 2006 .

[35]  W. X. Yuan,et al.  GaN single crystals grown under moderate nitrogen pressure by a new flux: Ca3N2 , 2006 .

[36]  M. Morishita,et al.  Promoted nitrogen dissolution due to the addition of Li or Ca to Ga-Na melt; some effects of additives on the growth of GaN single crystals using the sodium flux method , 2005 .

[37]  Edward A. Preble,et al.  Polar and nonpolar HVPE GaN substrates: impact of doping on the structural, electrical and optical characteristics , 2009 .

[38]  M. Rudziński,et al.  Homoepitaxy on bulk ammonothermal GaN , 2009 .

[39]  Jaime A. Freitas,et al.  Properties of Fe-doped semi-insulating GaN substrates for high-frequency device fabrication , 2007 .

[40]  C. Yokoyama,et al.  Physico-chemical features of the acid ammonothermal growth of GaN , 2008 .

[41]  Aaas News,et al.  Book Reviews , 1893, Buffalo Medical and Surgical Journal.

[42]  O. Shimomura,et al.  Congruent melting of gallium nitride at 6 GPa and its application to single-crystal growth , 2003, Nature materials.

[43]  Masahiko Shimada,et al.  Preparation of GaN single crystals using a Na flux , 1997 .

[44]  Neeraj Nepal,et al.  Sublimation growth of aluminum nitride crystals , 2006 .

[45]  Keith R. Evans,et al.  GaN Substrates for III-Nitride Devices , 2010, Proceedings of the IEEE.

[46]  I. Grzegory,et al.  Growth of bulk GaN by HVPE on pressure grown seeds , 2006, SPIE OPTO.

[47]  Balaji Raghothamachar,et al.  X-ray characterization of bulk AIN single crystals grown by the sublimation technique , 2003 .

[48]  Michal Bockowski,et al.  Bulk growth of gallium nitride: challenges and difficulties , 2007 .

[49]  M. Lefeld-Sosnowska,et al.  Extended defects in GaN single crystals , 2001 .

[50]  Takashi Mukai,et al.  High-power and wide wavelength range GaN-based laser diodes , 2006, SPIE OPTO.

[51]  Pierre Gibart,et al.  Optical and structural studies of high-quality bulk-like GaN grown by HVPE on a MOVPE AlN buffer layer , 2006 .

[52]  K. Fujito,et al.  High‐quality nonpolar m ‐plane GaN substrates grown by HVPE , 2008 .

[53]  Robert F. Davis,et al.  Growth of Bulk AlN and GaN Single Crystals by Sublimation , 1996 .

[54]  Dirk Ehrentraut,et al.  Advances in Bulk Crystal Growth of AlN and GaN , 2009 .

[55]  M. J. Suscavage,et al.  GaN single crystals grown on HVPE seeds in alkaline supercritical ammonia , 2006 .

[56]  Masashi Yoshimura,et al.  The effects of Na and some additives on nitrogen dissolution in the Ga-Na system: A growth mechanism of GaN in the Na flux method , 2005 .

[57]  Masashi Yoshimura,et al.  Growth of a Two-Inch GaN Single Crystal Substrate Using the Na Flux Method , 2006 .

[58]  Kevin Barraclough,et al.  I and i , 2001, BMJ : British Medical Journal.

[59]  Izabella Grzegory,et al.  Deposition of thick GaN layers by HVPE on the pressure grown GaN substrates , 2005 .

[60]  Dirk Ehrentraut,et al.  Prospects for the ammonothermal growth of large GaN crystal , 2007 .

[61]  Izabella Grzegory,et al.  High-pressure crystallization of GaN for electronic applications , 2002 .

[62]  Masahiko Shimada,et al.  GaN single crystal growth using high-purity Na as a flux , 2002 .

[63]  I. Grzegory,et al.  Thermodynamical properties of III–V nitrides and crystal growth of GaN at high N2 pressure , 1997 .

[64]  M. Callahan,et al.  Ammonothermal Synthesis of III-Nitride Crystals , 2006 .

[65]  R. Dwiliński,et al.  Excellent crystallinity of truly bulk ammonothermal GaN , 2008 .

[66]  J. Karpinski,et al.  Equilibrium pressure of N2 over GaN and high pressure solution growth of GaN , 1984 .

[67]  Mark E. Twigg,et al.  III-Nitride crystal growth from nitride-salt solution , 2007 .

[68]  Masashi Yoshimura,et al.  Drastic Decrease in Dislocations during Liquid Phase Epitaxy Growth of GaN Single Crystals Using Na flux Method without Any Artificial Processes , 2006 .

[69]  Hadis Morko,et al.  Handbook of Nitride Semiconductors and Devices , 2008 .

[70]  Balaji Raghothamachar,et al.  Seeded growth of bulk AlN crystals and grain evolution in polycrystalline AlN boules , 2005 .

[71]  N. Matsumoto,et al.  Dislocation reduction in GaN crystal by advanced-DEEP , 2007 .