Design of an additive manufactured XY compliant manipulator with spatial redundant constraints

This paper presents an additive manufactured beam flexure-based XY positioning stage with spatial redundant constraints. In order to restrict rotational error motions of the guidance module, a spatial redundant constraint is introduced. An additive manufacturing technique is adopted to monolithically fabricate the proposed positioning stage. Numerical simulation results show that the proposed XY positioning stage is capable to achieve ±2 × 2 mm2 working range. The fabricated prototyping stage shows that the advanced manufactured flexure mechanism can achieve good geometric effect and could be a good alternative to a metal-based flexure mechanism.

[1]  Han Ding,et al.  Motion stages for electronic packaging design and control , 2006, IEEE Robotics & Automation Magazine.

[2]  Jianmin Miao,et al.  Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives , 2006 .

[3]  K. Hoshino,et al.  Large displacement nanopositioning flexure fabricated by direct 3D printing of Titanium , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[4]  X. Kong,et al.  A Novel Large-Range XY Compliant Parallel Manipulator With Enhanced Out-of-Plane Stiffness , 2012 .

[5]  Shorya Awtar,et al.  Design of a Large Range XY Nanopositioning System , 2010 .

[6]  Shuichi Dejima,et al.  A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning , 2004 .

[7]  Hayato Yoshioka,et al.  A newly developed three-dimensional profile scanner with nanometer spatial resolution , 2010 .

[8]  Shorya Awtar,et al.  Characteristics of Beam-Based Flexure Modules , 2007 .

[9]  Joshua A. Tarbutton,et al.  Compliance and control characteristics of an additive manufactured-flexure stage. , 2015, The Review of scientific instruments.

[10]  S O R Moheimani,et al.  Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues. , 2012, The Review of scientific instruments.

[11]  Jie Gu,et al.  Six-axis nanopositioning device with precision magnetic levitation technology , 2004, IEEE/ASME Transactions on Mechatronics.

[12]  Kuo-Shen Chen,et al.  Design and Control of a Piezoelectric Driven Fatigue Testing System for Electronic Packaging Applications , 2006, IEEE Transactions on Components and Packaging Technologies.