Polarization phase-shifting point-diffraction interferometer.

A new instrument, the polarization phase-shifting point-diffraction interferometer, has been developed by use of a birefringent pinhole plate. The interferometer uses polarization to separate the test and reference beams, interfering what begin as orthogonal polarization states. The instrument is compact, simple to align, and vibration insensitive and can phase shift without moving parts or separate reference optics. The theory of the interferometer is presented, along with properties and fabrication techniques for the birefringent pinhole plate and a new model used to determine the quality of the reference wavefront from the pinhole as a function of pinhole size and test optic aberrations. The performance of the interferometer is also presented, along with a detailed error analysis and experimental results.

[1]  J. Wyant,et al.  Polarization phase-shifting point-diffraction interferometer. , 2006 .

[2]  Kenneth A. Goldberg,et al.  A 3-D Numerical Study of Pinhole Diffraction to Predict the Accuracy of EUV Point Diffraction Interferometry , 1995 .

[3]  W. Shurcliff Polarized light; production and use , 1962 .

[4]  Hans J. Tiziani,et al.  Quantitative Zernike phase-contrast microscopy by use of structured birefringent pupil-filters and phase-shift evaluation , 2002, SPIE Optics + Photonics.

[5]  K Creath,et al.  Liquid-crystal point-diffraction interferometer for wave-front measurements. , 1996, Applied optics.

[6]  W H Steel,et al.  Point-diffraction interference microscopy. , 1985, Applied optics.

[7]  James C. Wyant,et al.  Self-Referencing Wavefront Sensor , 1983, Optics & Photonics.

[8]  K Creath,et al.  Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. , 1995, Applied optics.

[9]  James C. Wyant Recent Investigations Of Interferometry And Applications To Optical Testing , 1980, Other Conferences.

[10]  A. Yariv Introduction to optical electronics , 1971 .

[11]  Satoru Toyooka,et al.  Phase shifting common path interferometer using a liquid-crystal phase modulator , 1994 .

[12]  J. Goodman Introduction to Fourier optics , 1969 .

[13]  Ian J. Hodgkinson,et al.  In situ measurement of principal refractive indices of thin films by two-angle ellipsometry , 1998 .

[14]  Raymond N. Smartt,et al.  Point-Diffraction Interferometer , 1974 .

[15]  T. Asakura,et al.  New common-path phase shifting interferometer using a polarization technique. , 1987, Applied optics.

[16]  O. Kwon,et al.  Multichannel phase-shifted interferometer. , 1984, Optics letters.

[17]  Qi Hong Wu,et al.  Birefringent Thin Films and Polarizing Elements , 1998 .

[18]  J. Bokor,et al.  Phase-shifting point diffraction interferometer. , 1996, Optics letters.

[19]  Raymond N. Smartt,et al.  Special Applications Of The Point-Diffraction Interferometer , 1979, Optics & Photonics.

[20]  A. Papoulis Linear systems, Fourier transforms, and optics , 1981, Proceedings of the IEEE.

[21]  Z Wang,et al.  Polarization pinhole interferometer. , 1991, Optics letters.