Short-range order in ultrathin film titanium dioxide studied by Raman spectroscopy

It is demonstrated here that nonresonant Raman spectroscopy can be used for unequivocal determination of short-range order in ultrathin films, using different structures of titanium dioxide as the model system. Titania films as thin as 7 nm sputter deposited on 〈111〉 Si have been analyzed and their phase content determined.

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