Design and Control of a Nanohandling Robot

Mobile robots for microand nanohandling can be a versatile tool for manipulation and assembly at the microand nanometer scale. This paper starts with an overview of past approaches towards such robots, each having disadvantages so far limiting industrial application. Based on several key concepts, a mobile robot was developed, combining an indirect stickslip actuation with the rigidity of solid piezoelectric plates. An automated characterization gives a precise insight into the robot's properties such as step size, maximum velocity and load dependency. The developed robot exhibits excellent repeatability, nanometer resolution and maximum velocities of up to 10mm/s. All robots are compared regarding several properties that are keys to a reliable application.

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