Three dimensional microfabrication in ceramics by solid state lasers

Abstract. Nano- and picosecond laser radiation offers better possibilities by achieving higher accuracy in microstructuring because of much lower heat load compared to larger pulses. The influence of wavelength, pulse energy, overlap and the properties of processing gas atmosphere on material removal and roughness of ceramics are investigated for ns-pulses. The removal threshold and the removal rate per pulse for ns- and ps- laser pulses are presented. Strategies, which reduce the surface roughness and enhance the efficieny of the production of three dimensional structures are reported. These results show the parameter field which permits a precise material removal during the production of microstructures without damaging the remaining structure.