Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

This paper presents designs and fabrication process of two single-axis PZT micromirrors with 1 mm diameter and 1.4 mm × 4 mm apertures, whose frequencies are 60 kHz and 17 kHz, respectively. These micromirrors achieve large optical scan angles of about 40° driven by 10 V rectangular pulses and show high Q-factors of more than 1000. The investigation on the long-term stability of a PZT driven micromirror has detected more than 100 Billion cycles. The combined results of experimental diagnostics and FEM analyses give rise to new designs iteratively leading to a larger deflection and appropriate frequencies, which are currently fabricated.