论文信息 - Comparison of Phase Diagrams for vhf and rf Plasma-Enhanced Chemical Vapor Deposition of Si:H Films - 字舞流文

Comparison of Phase Diagrams for vhf and rf Plasma-Enhanced Chemical Vapor Deposition of Si:H Films

Joshua M. Pearce | R. Collins | C. Wronski | A. Ferlauto | G. M. Ferreira | C. Ross