A Piezoelectric-Driven Linear Actuator by Means of Coupling Motion

A piezoelectric-driven actuator based on coupling motion has been proposed and tested to achieve a large linear working stroke with high resolution. “Z-shaped” flexure hinges are exploited for the symmetric flexure hinge mechanism to reduce the structural stress. Coupling motion is obtained by placing this symmetric flexure hinge mechanism with an angle of <inline-formula><tex-math notation="LaTeX">$\theta =20^\circ $</tex-math></inline-formula> to the slider. Experimental results indicate that linear motion with a large working stroke is effectively obtained by this coupling motion; the maximum motion speed is <inline-formula><tex-math notation="LaTeX">$V_{s}=$</tex-math> </inline-formula> 6057 μm/s and the maximum output force is <inline-formula><tex-math notation="LaTeX">$F_{g}=$ </tex-math></inline-formula> 350 g. Additionally, the influences of input frequency <inline-formula> <tex-math notation="LaTeX">$f$</tex-math></inline-formula> and input voltage <inline-formula><tex-math notation="LaTeX"> $U_{e}$</tex-math></inline-formula> are investigated, and the system kinetic model is established to better analyze the performance of this designed piezoelectric-driven linear actuator.