The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions
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A. E. Ieshkin | A. Trifonov | A. Garshev | V. Chernysh | V. Krupenin | D. Presnov | Y. Ermakov | D. Kireev | Y. Anufriev | I. G. Prokhorova
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A. E. Ieshkin | A. Trifonov | A. Garshev | V. Chernysh | V. Krupenin | D. Presnov | Y. Ermakov | D. Kireev | Y. Anufriev | I. G. Prokhorova