论文信息 - Comprehensive study of GeO2 oxidation, GeO desorption and GeO2-metal interaction -understanding of Ge processing kinetics for perfect interface control-

Comprehensive study of GeO2 oxidation, GeO desorption and GeO2-metal interaction -understanding of Ge processing kinetics for perfect interface control-

Based on the understanding of kinetic views of GeO desorption from GeO<inf>2</inf>/Ge stacks, thermodynamic control of the qualities of both GeO<inf>2</inf> films and GeO<inf>2</inf>/Ge interfaces was demonstrated. It was proposed to characterize the effects of GeO desorption on GeO<inf>2</inf> by the optical absorption. In addition, MIS band alignment was also discussed from the viewpoint of the effects of metal-GeO<inf>2</inf> interaction at the top interface.

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