TiO2 nanowires array fabrication and gas sensing properties

Abstract A cheap nanofabrication process for titania (TiO2) polycrystalline nanowire array for gas sensing applications with lateral size ranging from 90 to 180 nm, and gas sensing characterizations are presented. Alternatively to typical pattern transfer techniques for submicron fabrication, authors focused on a standard 365 nm UV photolithographic process able to fabricate sol–gel nanostructured titania nanowires from a solid thin film. Main aim of present work is the experimental validation of enhanced gas sensing response of nanopatterned metal oxide thin film sensors. Two different kinds of gas sensor with nanopatterned sensitive area have been realized onto silicon substrates and tested towards different EtOH concentrations; experimental tests have been carried out with a contemporary output signals collection from a nanowires-based gas sensor and a second device with solid sensitive film without patterning, in order to validate effects of nanomachining on sensitive material response.

[1]  P. Moseley,et al.  Solid state gas sensors , 1997 .

[2]  N. Bârsan,et al.  Conduction models in gas-sensing SnO2 layers: grain-size effects and ambient atmosphere influence , 1994 .

[3]  N. Barsan,et al.  Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors: a status report , 1999 .

[4]  L. Lescouzères,et al.  A Novel Mechanism for the Synthesis of Tin /Tin Oxide Nanoparticles of Low Size Dispersion and of Nanostructured SnO2 for the Sensitive Layers of Gas Sensors , 1999 .

[5]  Kenji Uchino,et al.  Functional and Smart Materials: Structural Evolution and Structure Analysis, by Zhong Lin Wang and Zhen Chuan Kang , 1998 .

[6]  K. Jeong,et al.  Growth of Carbon Nanotubes on Anodic Aluminum Oxide Templates: Fabrication of a Tube-in-Tube and Linearly Joined Tube , 2001 .

[7]  Antonio Ficarella,et al.  Temperature and doping effects on performance of titania thin film lambda probe , 2005 .

[8]  J. Duvail,et al.  Fabrication and properties of arrays of superconducting nanowires , 1999 .

[9]  Elson Longo,et al.  A New Method to Control Particle Size and Particle Size Distribution of SnO2 Nanoparticles for Gas Sensor Applications , 2000 .

[10]  Xiaosheng Fang,et al.  Temperature‐Controlled Catalytic Growth of ZnS Nanostructures by the Evaporation of ZnS Nanopowders , 2005 .

[11]  X. Fang,et al.  Twinning‐Mediated Growth of Al2O3 Nanobelts and Their Enhanced Dielectric Responses , 2005 .

[12]  Younan Xia,et al.  One‐Dimensional Nanostructures: Synthesis, Characterization, and Applications , 2003 .

[13]  Xin Fang,et al.  Temperature-controlled growth of α-Al2O3 nanobelts and nanosheets , 2003 .

[14]  Lide Zhang,et al.  Direct observation of the growth process of MgO nanoflowers by a simple chemical route. , 2005, Small.

[15]  Xiaobo Chen,et al.  Synthesis of titanium dioxide (TiO2) nanomaterials. , 2006, Journal of nanoscience and nanotechnology.

[16]  Charles M. Lieber,et al.  Doping and Electrical Transport in Silicon Nanowires , 2000 .

[17]  Takashi Fukui,et al.  Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays , 2005 .

[18]  S. G. Ansari,et al.  Grain size effects on H2 gas sensitivity of thick film resistor using SnO2 nanoparticles , 1997 .

[19]  Chaemin Chun,et al.  Well-ordered TiO2 nanostructures fabricated using surface relief gratings on polymer films , 2006 .

[20]  Zhong Lin Wang,et al.  Road Map for the Controlled Synthesis of CdSe Nanowires, Nanobelts, and Nanosaws—A Step Towards Nanomanufacturing , 2005 .

[21]  J. Fergus.  Doping and defect association in oxides for use in oxygen sensors , 2003 .

[22]  Luca Francioso,et al.  Design of an Electronic Nose for Selective Phosphine Detection in Cereals , 2006 .

[23]  Geoffrey A. Ozin,et al.  Tin dioxide opals and inverted opals: near-ideal microstructures for gas sensors , 2001 .

[24]  Wolfgang Göpel,et al.  SnO2 sensors: current status and future prospects☆ , 1995 .

[25]  X. Fang,et al.  Controlled Growth of One-Dimensional Oxide Nanomaterials , 2009 .