Marvelous MEMS
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S. Roundy | J. Bryzek | B. Bircumshaw | C. Chung | K. Castellino | J.R. Stetter | M. Vestel | J. Stetter | S. Roundy | J. Bryzek | M. Vestel | B. Bircumshaw | C. Chung | K. Castellino | Janusz Bryzek | Brian Bircumshaw | Charles Chung | Kenneth Castellino | Joseph R. Stetter | Michael Vestel
[1] Reinoud F. Wolffenbuttel,et al. Integrated grating/detector array fabricated in silicon using micromachining techniques , 1992 .
[2] Roberto Oboe,et al. Modeling and control of a dual stage actuator hard disk drive with piezoelectric secondary actuator , 1999, 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Cat. No.99TH8399).
[3] James W. Holm-Kennedy,et al. Novel monolithic chip-integrated color spectrometer: the distributed-wavelength filter component , 1991, Optics & Photonics.
[4] Philip H. W. Leong,et al. A Laser-micromachined Multi-modal Resonating Power Transducer for Wireless Sensing Systems , 2001 .
[5] Neil M. White,et al. The modelling of a piezoelectricvibration powered generator for microsystems , 2001 .
[6] Mauricio Terrones,et al. New direction in nanotube science , 2004 .
[7] Joseph R. Stetter,et al. Sensing with Nafion Coated Carbon Nanotube Field-Effect Transistors , 2004 .
[8] J. Goschnick,et al. Multisensor microsystem for contaminants in air , 1996 .
[9] R. Service,et al. Nanotechnology Grows Up , 2004, Science.
[10] Cam Nguyen,et al. UHF high-order radial-contour-mode disk resonators , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.
[11] M. U. Demirci,et al. Stemless wine-glass-mode disk micromechanical resonators , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
[12] A. Barwicz,et al. Functional and technological integration of measurement microsystems , 2004, IEEE Instrumentation & Measurement Magazine.
[13] M. Meyyappan,et al. Carbon Nanotube Sensors for Gas and Organic Vapor Detection , 2003 .
[14] G. J. Maclay,et al. Carbon Nanotubes and Sensors: a Review , 2004 .
[15] M. Stordeur,et al. Low power thermoelectric generator-self-sufficient energy supply for micro systems , 1997, XVI ICT '97. Proceedings ICT'97. 16th International Conference on Thermoelectrics (Cat. No.97TH8291).
[16] Charles S. Smith. Piezoresistance Effect in Germanium and Silicon , 1954 .
[17] C.T.-C. Nguyen,et al. Transceiver front-end architectures using vibrating micromechanical signal processors , 2001, 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers (IEEE Cat. No.01EX496).
[18] K. Petersen. Micromechanical light modulator array fabricated on silicon , 1977 .
[19] M. Roukes. Nanoelectromechanical Systems , 2000, cond-mat/0008187.
[20] Michael L. Simpson,et al. Vertically Aligned Carbon Nanofibers and Related Structures: Controlled Synthesis and Directed Assembly , 2005 .
[21] Craig A. Grimes,et al. A Sentinel Sensor Network for Hydrogen Sensing , 2003 .
[22] Zhixin Guo,et al. Aligned nanotubes. , 2003, Chemphyschem : a European journal of chemical physics and physical chemistry.
[23] J.R. Clark,et al. High-Q VHF micromechanical contour-mode disk resonators , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).
[24] Anantha Chandrakasan,et al. Vibration-to-electric energy conversion , 1999, Proceedings. 1999 International Symposium on Low Power Electronics and Design (Cat. No.99TH8477).
[25] N. Anheier,et al. Miniaturized spectrometer employing planar waveguides and grating couplers for chemical analysis. , 1990, Applied optics.
[26] Woo-Tae Park,et al. Frequency stability of wafer-scale encapsulated MEMS resonators , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[27] Miguel Valcárcel,et al. Present and future applications of carbon nanotubes to analytical science , 2005, Analytical and bioanalytical chemistry.
[28] T. S. Birch,et al. Development of an electromagnetic micro-generator , 1997 .
[29] G. Ono,et al. Electric-energy generation using variable-capacitive resonator for power-free LSI: efficiency analysis and fundamental experiment , 2003, Proceedings of the 2003 International Symposium on Low Power Electronics and Design, 2003. ISLPED '03..
[30] R. Ghodssi,et al. High-speed microfabricated silicon turbomachinery and fluid film bearings , 2005, Journal of Microelectromechanical Systems.
[31] S. S. Lee,et al. Surface‐micromachined free‐space micro‐optical systems containing three‐dimensional microgratings , 1995 .
[32] Sam Kassegne,et al. Carbon-MEMS architectures for 3D microbatteries , 2004, SPIE Photonics Europe.
[33] W. Messner,et al. Piezoelectric microactuator for dual stage control , 1999 .
[34] G. Wachutka,et al. Micromachined CMOS thermoelectric generators as on-chip power supply , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[35] Bernard H. Stark,et al. MEMS electrostatic micropower generator for low frequency operation , 2004 .
[36] J. Bates. Thin-Film Lithium and Lithium-Ion Batteries , 2000 .
[37] H. Seppa,et al. Micromechanical bulk acoustic wave resonator , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..
[38] Jan M. Rabaey,et al. Improving power output for vibration-based energy scavengers , 2005, IEEE Pervasive Computing.
[39] Adrien Badel,et al. High-performance piezoelectric vibration energy reclamation , 2004, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[40] M. Kishi,et al. Micro thermoelectric modules and their application to wristwatches as an energy source , 1999, Eighteenth International Conference on Thermoelectrics. Proceedings, ICT'99 (Cat. No.99TH8407).
[41] Tsu-Jae King,et al. The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[42] Roger T. Howe,et al. POLY-SIGE HIGH FREQUENCY RESONATORS BASED ON LITHOGRAPHIC DEFINITION OF NANO-GAP LATERAL TRANSDUCERS , 2004 .
[43] Paul K. Wright,et al. A piezoelectric vibration based generator for wireless electronics , 2004 .
[44] Neil M. White,et al. Design and fabrication of a new vibration-based electromechanical power generator , 2001 .
[45] William C. Tang,et al. Laterally driven polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[46] G. M. Yee,et al. Miniature spectrometers for biochemical analysis , 1997 .