Marvelous MEMS

Microelectromechanical systems (MEMS) are a foundation for a broad range of mechanical, chemical, optical, and biotech products (sensors, microstructures and actuators) fabricated as integrated circuits on (primarily) silicon wafers in a batch mode. Commercial MEMS products include pressure sensors, acceleration sensors, gyros, ink-jet nozzles, read-write head positioners in hard drives, and digital light processors (DLPs) in projectors and television sets. The first four decades of MEMS development created a US$8 billion market. During the next decade, the MEMS market is estimated to increase by US$32 billion. Based on the presented overview of emerging MEMS sensors and microstructures, such a magnitude of growth is definitely possible.

[1]  Reinoud F. Wolffenbuttel,et al.  Integrated grating/detector array fabricated in silicon using micromachining techniques , 1992 .

[2]  Roberto Oboe,et al.  Modeling and control of a dual stage actuator hard disk drive with piezoelectric secondary actuator , 1999, 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Cat. No.99TH8399).

[3]  James W. Holm-Kennedy,et al.  Novel monolithic chip-integrated color spectrometer: the distributed-wavelength filter component , 1991, Optics & Photonics.

[4]  Philip H. W. Leong,et al.  A Laser-micromachined Multi-modal Resonating Power Transducer for Wireless Sensing Systems , 2001 .

[5]  Neil M. White,et al.  The modelling of a piezoelectricvibration powered generator for microsystems , 2001 .

[6]  Mauricio Terrones,et al.  New direction in nanotube science , 2004 .

[7]  Joseph R. Stetter,et al.  Sensing with Nafion Coated Carbon Nanotube Field-Effect Transistors , 2004 .

[8]  J. Goschnick,et al.  Multisensor microsystem for contaminants in air , 1996 .

[9]  R. Service,et al.  Nanotechnology Grows Up , 2004, Science.

[10]  Cam Nguyen,et al.  UHF high-order radial-contour-mode disk resonators , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.

[11]  M. U. Demirci,et al.  Stemless wine-glass-mode disk micromechanical resonators , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[12]  A. Barwicz,et al.  Functional and technological integration of measurement microsystems , 2004, IEEE Instrumentation & Measurement Magazine.

[13]  M. Meyyappan,et al.  Carbon Nanotube Sensors for Gas and Organic Vapor Detection , 2003 .

[14]  G. J. Maclay,et al.  Carbon Nanotubes and Sensors: a Review , 2004 .

[15]  M. Stordeur,et al.  Low power thermoelectric generator-self-sufficient energy supply for micro systems , 1997, XVI ICT '97. Proceedings ICT'97. 16th International Conference on Thermoelectrics (Cat. No.97TH8291).

[16]  Charles S. Smith Piezoresistance Effect in Germanium and Silicon , 1954 .

[17]  C.T.-C. Nguyen,et al.  Transceiver front-end architectures using vibrating micromechanical signal processors , 2001, 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers (IEEE Cat. No.01EX496).

[18]  K. Petersen Micromechanical light modulator array fabricated on silicon , 1977 .

[19]  M. Roukes Nanoelectromechanical Systems , 2000, cond-mat/0008187.

[20]  Michael L. Simpson,et al.  Vertically Aligned Carbon Nanofibers and Related Structures: Controlled Synthesis and Directed Assembly , 2005 .

[21]  Craig A. Grimes,et al.  A Sentinel Sensor Network for Hydrogen Sensing , 2003 .

[22]  Zhixin Guo,et al.  Aligned nanotubes. , 2003, Chemphyschem : a European journal of chemical physics and physical chemistry.

[23]  J.R. Clark,et al.  High-Q VHF micromechanical contour-mode disk resonators , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[24]  Anantha Chandrakasan,et al.  Vibration-to-electric energy conversion , 1999, Proceedings. 1999 International Symposium on Low Power Electronics and Design (Cat. No.99TH8477).

[25]  N. Anheier,et al.  Miniaturized spectrometer employing planar waveguides and grating couplers for chemical analysis. , 1990, Applied optics.

[26]  Woo-Tae Park,et al.  Frequency stability of wafer-scale encapsulated MEMS resonators , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[27]  Miguel Valcárcel,et al.  Present and future applications of carbon nanotubes to analytical science , 2005, Analytical and bioanalytical chemistry.

[28]  T. S. Birch,et al.  Development of an electromagnetic micro-generator , 1997 .

[29]  G. Ono,et al.  Electric-energy generation using variable-capacitive resonator for power-free LSI: efficiency analysis and fundamental experiment , 2003, Proceedings of the 2003 International Symposium on Low Power Electronics and Design, 2003. ISLPED '03..

[30]  R. Ghodssi,et al.  High-speed microfabricated silicon turbomachinery and fluid film bearings , 2005, Journal of Microelectromechanical Systems.

[31]  S. S. Lee,et al.  Surface‐micromachined free‐space micro‐optical systems containing three‐dimensional microgratings , 1995 .

[32]  Sam Kassegne,et al.  Carbon-MEMS architectures for 3D microbatteries , 2004, SPIE Photonics Europe.

[33]  W. Messner,et al.  Piezoelectric microactuator for dual stage control , 1999 .

[34]  G. Wachutka,et al.  Micromachined CMOS thermoelectric generators as on-chip power supply , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[35]  Bernard H. Stark,et al.  MEMS electrostatic micropower generator for low frequency operation , 2004 .

[36]  J. Bates Thin-Film Lithium and Lithium-Ion Batteries , 2000 .

[37]  H. Seppa,et al.  Micromechanical bulk acoustic wave resonator , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[38]  Jan M. Rabaey,et al.  Improving power output for vibration-based energy scavengers , 2005, IEEE Pervasive Computing.

[39]  Adrien Badel,et al.  High-performance piezoelectric vibration energy reclamation , 2004, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[40]  M. Kishi,et al.  Micro thermoelectric modules and their application to wristwatches as an energy source , 1999, Eighteenth International Conference on Thermoelectrics. Proceedings, ICT'99 (Cat. No.99TH8407).

[41]  Tsu-Jae King,et al.  The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[42]  Roger T. Howe,et al.  POLY-SIGE HIGH FREQUENCY RESONATORS BASED ON LITHOGRAPHIC DEFINITION OF NANO-GAP LATERAL TRANSDUCERS , 2004 .

[43]  Paul K. Wright,et al.  A piezoelectric vibration based generator for wireless electronics , 2004 .

[44]  Neil M. White,et al.  Design and fabrication of a new vibration-based electromechanical power generator , 2001 .

[45]  William C. Tang,et al.  Laterally driven polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[46]  G. M. Yee,et al.  Miniature spectrometers for biochemical analysis , 1997 .