论文信息 - Formation of unstrained Si1−xGex. layers by high-dose 74Ge ion implantation in SIMOX - 字舞流文

Formation of unstrained Si1−xGex. layers by high-dose 74Ge ion implantation in SIMOX

B. Holländer | S. Mantl | D. Gerthsen | L. Vescan | W. Michelsen | S. Mesters | A. Hartmann