A new on-wafer multiline thru-reflect-line (TRL) calibration standard design

By using invert microstrip, a new on wafer multiline TRL calibration kits for THz measurement are designed in this paper. Our approach is based on the multi-frequency formulation of the vector network analyzer calibration problem. The calibration kits are designed covers a range of frequencies from 70 to 220 GHz. The simulator results are given in this paper.