论文信息 - Formation of orthorhombic (Zr,Ta)O2 in thin Zr-Ta-O films - 字舞流文

Formation of orthorhombic (Zr,Ta)O2 in thin Zr-Ta-O films

J. Heitmann | D. Rafaja | D. Lehninger | J. Borany | J. Wünsche | F. Schneider